Authors: Kasielynn Bussard, Dakota Stringham
Mentors: Matthias Pleil
Insitution: Salt Lake Community College
We are two students from Salt Lake Community College who participated in a summer research workshop in the cleanroom at the University of New Mexico. We were taught the pressure sensor fabrication process, along with the post-production testing methods. For our research project we decided to test how using different biocompatible metals, and different combinations of said metals, for the circuit would affect the pressure sensors functionality. To test this, we prepped five 4” inch wafers and used photolithography to define the Wheatstone bridge pattern, followed by sputter metal deposition. When sputter coating, we coated each wafer in a Venn diagram pattern. This left us with two areas of a single metal on the outside edges, and an area in the middle with both metals present. We then measured the resistance of each section to determine how it changed with different metals.